High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applications

Published 2012 View Full Article

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Title
High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applications
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 188, Issue -, Pages 342-348
Publisher
Elsevier BV
Online
2012-03-17
DOI
10.1016/j.sna.2012.03.013

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