4.7 Article Proceedings Paper

A bistable SMA microvalve for 3/2-way control

Journal

SENSORS AND ACTUATORS A-PHYSICAL
Volume 188, Issue -, Pages 285-291

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2011.11.016

Keywords

Bistability; Latching; Shape memory alloy (SMA); Microvalve; Magnetostatics

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In this paper the layout, fabrication, and characterization of a first-of-its-kind bistable 3/2-way shape memory microvalve are presented. A symmetric arrangement of two counteracting shape memory alloy (SMA) microbridges is used for switching. The stable states in power-off condition are realized by magnetostatic contact forces between a movable hard-magnetic cylinder and two soft-magnetic layers. A detailed design study of the magnetic retaining system is performed to meet the requirements of a large pressure range and identical flow rates in the open valve state and a low leakage in the closed valve state in both outlet ports. The overall dimensions of first demonstrators are 11 mm x 6 mm x 4 mm. The 3/2-way bistable microvalve performance is demonstrated, showing identical flow rates in both outlet ports for a pressure difference up to 200 kPa for gas (N-2) and up to 100 kPa for liquid (water) with flow rates of 1250 sccm and 11 ml/min, respectively. (C) 2011 Elsevier B.V. All rights reserved.

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