Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches

Published 2011 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 169, Issue 1, Pages 242-249
Publisher
Elsevier BV
Online
2011-05-08
DOI
10.1016/j.sna.2011.04.041

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.