A highly sensitive humidity sensor based on DC reactive magnetron sputtered zinc oxide thin film

Published 2010 View Full Article

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Title
A highly sensitive humidity sensor based on DC reactive magnetron sputtered zinc oxide thin film
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 164, Issue 1-2, Pages 8-14
Publisher
Elsevier BV
Online
2010-09-16
DOI
10.1016/j.sna.2010.09.006

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