Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 163, Issue 1, Pages 32-36Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2010.06.016
Keywords
Vibration; Microdiaphragm; Piezoelectric; Pressure
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Pressure influences on the vibration characteristics of piezoelectric circular microdiaphragm based pressure sensors are investigated theoretically and experimentally. It was demonstrated that only Bessel function of zero order, m = 0, participates in the vibration modes of the microdiaphragm symmetrically loaded by pressure. The piezoelectric circular microdiaphragm was fabricated by combining sal-gel PZT thin film and MEMS technology. A high value of pressure sensitivity, as high as 280 Hz/mbar, has been achieved; this value is 2.43 times higher than the currently reported sensitivity (i.e.,115 Hz/mbar) in the literature. (C) 2010 Elsevier B.V. All rights reserved.
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