Post processing of microstructures by PDMS spray deposition

Published 2009 View Full Article

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Title
Post processing of microstructures by PDMS spray deposition
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 155, Issue 2, Pages 253-262
Publisher
Elsevier BV
Online
2009-09-11
DOI
10.1016/j.sna.2009.08.029

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