Photolithography system with liquid crystal display as active gray-tone mask for 3D structuring of photoresist

Published 2008 View Full Article

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Title
Photolithography system with liquid crystal display as active gray-tone mask for 3D structuring of photoresist
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 144, Issue 2, Pages 381-388
Publisher
Elsevier BV
Online
2008-03-13
DOI
10.1016/j.sna.2008.02.014

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