Macroporous silicon: A versatile material for 3D structure fabrication

Published 2007 View Full Article

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Title
Macroporous silicon: A versatile material for 3D structure fabrication
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 141, Issue 2, Pages 662-669
Publisher
Elsevier BV
Online
2007-09-08
DOI
10.1016/j.sna.2007.09.001

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