Piezoelectric thin films for MEMS applications—A comparative study of PZT, 0.7PMN–0.3PT and 0.9PMN–0.1PT thin films grown on Si by r.f. magnetron sputtering

Published 2008 View Full Article

Authors

Keywords

Journal

SENSORS AND ACTUATORS A-PHYSICAL

Volume 148, Issue 1, Pages 122-128

Publisher

Elsevier BV

Online

2008-08-04

DOI

10.1016/j.sna.2008.07.021

Ask authors/readers for more resources

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

SENSORS AND ACTUATORS A-PHYSICAL

Ask authors/readers for more resources

Protocol

Reagent

Reprint

Find Funding. Review Successful Grants.

Create your own webinar