Characterization and control of a pneumatic microactuator with an integrated inductive position sensor

Title
Characterization and control of a pneumatic microactuator with an integrated inductive position sensor
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 141, Issue 1, Pages 192-200
Publisher
Elsevier BV
Online
2007-07-23
DOI
10.1016/j.sna.2007.07.012

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