Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept

Published 2007 View Full Article

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Title
Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 142, Issue 1, Pages 398-404
Publisher
Elsevier BV
Online
2007-03-06
DOI
10.1016/j.sna.2007.02.024

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