Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity

Title
Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity
Authors
Keywords
-
Journal
SENSORS
Volume 12, Issue 11, Pages 15873-15887
Publisher
MDPI AG
Online
2012-11-17
DOI
10.3390/s121115873

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