Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors

Published 2010 View Full Article

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Title
Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors
Authors
Keywords
-
Journal
SENSORS
Volume 10, Issue 9, Pages 8173-8184
Publisher
MDPI AG
Online
2010-09-19
DOI
10.3390/s100908173
References
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