Experimental Study on the Effects of Alumina Abrasive Particle Behavior in MR Polishing for MEMS Applications

Published 2008 View Full Article

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Title
Experimental Study on the Effects of Alumina Abrasive Particle Behavior in MR Polishing for MEMS Applications
Authors
Keywords
-
Journal
SENSORS
Volume 8, Issue 1, Pages 222-235
Publisher
MDPI AG
Online
2008-12-01
DOI
10.3390/s8010222

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