Electrical and optical properties of zinc-oxide films deposited by the ion-beam sputtering of an oxide target

Title
Electrical and optical properties of zinc-oxide films deposited by the ion-beam sputtering of an oxide target
Authors
Keywords
Zinc Oxide, Free Charge Carrier, Optical Absorption Edge, Zinc Oxide Film, Oxide Target
Journal
SEMICONDUCTORS
Volume 48, Issue 9, Pages 1242-1247
Publisher
Pleiades Publishing Ltd
Online
2014-08-31
DOI
10.1134/s1063782614090073

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