4.0 Article

Evidence of surface states for AlGaN/GaN/SiC HEMTs passivated Si3N4 by CDLTS

Journal

SEMICONDUCTORS
Volume 46, Issue 3, Pages 382-385

Publisher

PLEIADES PUBLISHING INC
DOI: 10.1134/S1063782612030104

Keywords

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Funding

  1. Comite Mixte de Cooperation Universitaire (CMCU) France-Tunisie [08G1305]

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In AlGaN/GaN heterostructure field-effect transistors (HEMTs) structures, the surface defects and dislocations may serve as trapping centers and affect the device performance via leakage current and low frequency noise. This work demonstrates the effect of surface passivation on the current-voltage characteristics and we report results of our investigation of the trapping characteristics of Si3N4-passivated AlGaN/GaN HEMTs on SiC substrates using the conductance deep levels transient spectroscopy (CDLTS) technique. From the measured of CDLTS we identified one electron trap had an activation energy of 0.31 eV it has been located in the AlGaN layer and two hole-likes traps H (1), H (2). It has been pointed out that the two hole-likes traps signals did not originate from changes in hole trap population in the channel, but reflected the changes in the electron population in the surface states of the HEMT access regions.

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