Photoinduced etching of thin films of chalcogenide glassy semiconductors

Title
Photoinduced etching of thin films of chalcogenide glassy semiconductors
Authors
Keywords
-
Journal
SEMICONDUCTORS
Volume 46, Issue 4, Pages 504-508
Publisher
Pleiades Publishing Ltd
Online
2012-04-17
DOI
10.1134/s1063782612040057

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