Formation of 2D photonic crystal bars by simultaneous photoelectrochemical etching of trenches and macropores in silicon

Published 2011 View Full Article

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Title
Formation of 2D photonic crystal bars by simultaneous photoelectrochemical etching of trenches and macropores in silicon
Authors
Keywords
-
Journal
SEMICONDUCTORS
Volume 44, Issue 12, Pages 1617-1623
Publisher
Pleiades Publishing Ltd
Online
2011-02-07
DOI
10.1134/s1063782610120158
References
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