Frequency-dependent dielectric response of HfTaOx-based metal–insulator–metal capacitors

Published 2012 View Full Article

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Title
Frequency-dependent dielectric response of HfTaOx-based metal–insulator–metal capacitors
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 27, Issue 8, Pages 085002
Publisher
IOP Publishing
Online
2012-06-07
DOI
10.1088/0268-1242/27/8/085002

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