Combined effect of the target composition and deposition temperature on the properties of ZnO:Ga transparent conductive oxide films in pulsed dc magnetron sputtering
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Title
Combined effect of the target composition and deposition temperature on the properties of ZnO:Ga transparent conductive oxide films in pulsed dc magnetron sputtering
Authors
Keywords
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Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 26, Issue 11, Pages 115007
Publisher
IOP Publishing
Online
2011-10-12
DOI
10.1088/0268-1242/26/11/115007
References
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