Low content indium-doped zinc oxide films with tunable work function fabricated through magnetron sputtering

Published 2010 View Full Article

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Title
Low content indium-doped zinc oxide films with tunable work function fabricated through magnetron sputtering
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 25, Issue 4, Pages 045008
Publisher
IOP Publishing
Online
2010-02-24
DOI
10.1088/0268-1242/25/4/045008

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