Effects of tool edge radius on ductile machining of silicon: an investigation by FEM

Published 2009 View Full Article

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Title
Effects of tool edge radius on ductile machining of silicon: an investigation by FEM
Authors
Keywords
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Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 24, Issue 7, Pages 075018
Publisher
IOP Publishing
Online
2009-06-10
DOI
10.1088/0268-1242/24/7/075018
References
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