Effect of the plasma composition on the structural and electronic properties of as-grown SiOx/Si heterolayers deposited by reactive sputtering

Title
Effect of the plasma composition on the structural and electronic properties of as-grown SiOx/Si heterolayers deposited by reactive sputtering
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 24, Issue 10, Pages 105028
Publisher
IOP Publishing
Online
2009-09-26
DOI
10.1088/0268-1242/24/10/105028

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