Threshold-voltage distribution of Pt/SrBi2Ta2O9/Hf–Al–O/Si MFIS FETs

Title
Threshold-voltage distribution of Pt/SrBi2Ta2O9/Hf–Al–O/Si MFIS FETs
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 23, Issue 4, Pages 045011
Publisher
IOP Publishing
Online
2008-03-13
DOI
10.1088/0268-1242/23/4/045011

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