The impact of line edge roughness on the stability of a FinFET SRAM

Title
The impact of line edge roughness on the stability of a FinFET SRAM
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 24, Issue 2, Pages 025005
Publisher
IOP Publishing
Online
2008-12-19
DOI
10.1088/0268-1242/24/2/025005

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