Variable-angle high-angle annular dark-field imaging: application to three-dimensional dopant atom profiling
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Title
Variable-angle high-angle annular dark-field imaging: application to three-dimensional dopant atom profiling
Authors
Keywords
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Journal
Scientific Reports
Volume 5, Issue 1, Pages -
Publisher
Springer Nature
Online
2015-07-24
DOI
10.1038/srep12419
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