Controllable residual stresses in sputtered nanostructured alpha-tantalum

Title
Controllable residual stresses in sputtered nanostructured alpha-tantalum
Authors
Keywords
-
Journal
SCRIPTA MATERIALIA
Volume 63, Issue 8, Pages 867-870
Publisher
Elsevier BV
Online
2010-07-02
DOI
10.1016/j.scriptamat.2010.06.037

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