Influence of radio frequency sputtering power towards the properties of indium zinc oxide semiconducting films

Published 2008 View Full Article

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Title
Influence of radio frequency sputtering power towards the properties of indium zinc oxide semiconducting films
Authors
Keywords
-
Journal
SCRIPTA MATERIALIA
Volume 60, Issue 1, Pages 48-51
Publisher
Elsevier BV
Online
2008-09-14
DOI
10.1016/j.scriptamat.2008.08.039

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