Study on PECVD SiO2/Si3N4 double-layer electrets with different thicknesses

Published 2011 View Full Article

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Title
Study on PECVD SiO2/Si3N4 double-layer electrets with different thicknesses
Authors
Keywords
-
Journal
Science China-Technological Sciences
Volume 54, Issue 8, Pages 2123-2129
Publisher
Springer Nature
Online
2011-05-15
DOI
10.1007/s11431-011-4423-z
References
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