MATERIALS SCIENCE: The Cutting Edge of Plasma Etching

Published 2008 View Full Article

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Title
MATERIALS SCIENCE: The Cutting Edge of Plasma Etching
Authors
Keywords
-
Journal
SCIENCE
Volume 319, Issue 5866, Pages 1050-1051
Publisher
American Association for the Advancement of Science (AAAS)
Online
2008-02-22
DOI
10.1126/science.1153901

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