4.7 Article

Fabrication and property analysis of a MEMS micro-gripper for robotic micro-manipulation

Journal

ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING
Volume 28, Issue 1, Pages 50-56

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.rcim.2011.06.005

Keywords

MEMS micro-gripper; Stiffness; Grip force; Micro-manipulation

Funding

  1. Kookmin University in Korea
  2. National Research Foundation of Korea
  3. Korean Government [KRF-D00192]

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The micro-gripper is an essential device in micro-manipulation. A new micro-gripper fabrication process using MEMS technology is developed for a robotic micro-manipulation system. The mechanical stiffness of this gripper is analyzed with the Pseudo-Rigid Body Model to estimate the grip force of these micro-grippers of various scales and materials. The validity of the proposed model is verified by simulations and experiments. An experimental robotic micro-manipulation system consisting of this micro-gripper and a precision manipulator is implemented, and an actual gripping test is conducted to evaluate the robotic manipulation system. (C) 2011 Elsevier Ltd. All rights reserved.

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