Shear thickening of chemical mechanical polishing slurries under high shear

Title
Shear thickening of chemical mechanical polishing slurries under high shear
Authors
Keywords
-
Journal
RHEOLOGICA ACTA
Volume 51, Issue 7, Pages 637-647
Publisher
Springer Nature
Online
2012-05-30
DOI
10.1007/s00397-012-0636-8

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