High quality single atomic layer deposition of hexagonal boron nitride on single crystalline Rh(111) four-inch wafers

Title
High quality single atomic layer deposition of hexagonal boron nitride on single crystalline Rh(111) four-inch wafers
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 85, Issue 3, Pages 035101
Publisher
AIP Publishing
Online
2014-03-04
DOI
10.1063/1.4866648

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