4.5 Article

Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling

Journal

REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 85, Issue 12, Pages -

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.4902818

Keywords

-

Funding

  1. Max Planck Society
  2. ERC project SQUTEC
  3. DFG [SFB/TR21]
  4. EU project DIAMANT
  5. EU project SIQS
  6. EU project QESSENCE
  7. EU project QINVC
  8. JST-DFG [FOR1482, FOR1493]
  9. Volkswagenstiftung
  10. Landesstiftung Baden-wurttemberg

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Recent efforts to define microscopic solid-immersion-lenses (SIL) by focused ion beam milling into diamond substrates that are registered to a preselected single photon emitter are summarized. We show how we determine the position of a single emitter with at least 100 nm lateral and 500 nm axial accuracy, and how the milling procedure is optimized. The characteristics of a single emitter, a Nitrogen Vacancy (NV) center in diamond, are measured before and after producing the SIL and compared with each other. A count rate of 1.0 x 10(6) counts/s is achieved with a [111] oriented NV center. (C) 2014 AIP Publishing LLC.

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