High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues
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Title
High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues
Authors
Keywords
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Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 83, Issue 6, Pages 063701
Publisher
AIP Publishing
Online
2012-06-06
DOI
10.1063/1.4725525
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