Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 83, Issue 7, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4732821
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- BMBF within the project Light2Hydrogen
- federal state Mecklenburg-Vorpommern within the project Nano4Hydrogen
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The design and performance of an experimental setup utilizing a magnetron sputtering source for production of beams of ionized size-selected clusters for deposition in ultra-high vacuum is described. For the case of copper cluster formation the influence of different source parameters is studied and analyzed. Size-selected clusters are deposited on substrates and the efficiency of an electrostatic quadrupole mass selector is tested. Height analysis using atomic force microscopy (AFM) demonstrates relative standard size deviations of 7%-10% for the particles of various sizes between 6 nm and 19 nm. Combined analysis by AFM and transmission electron microscopy reveals that the clusters preserve almost spherical shape after the deposition on amorphous carbon substrates. Supported nanoparticles of a few nanometres in diameter have crystalline structure with a face-centered cubic (fcc) lattice. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4732821]
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