Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis

Published 2011 View Full Article

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Title
Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis
Authors
Keywords
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Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 82, Issue 11, Pages 113701
Publisher
AIP Publishing
Online
2011-11-05
DOI
10.1063/1.3657156
References
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