Note: Influence of rinsing and drying routines on growth of multilayer thin films using automated deposition system

Title
Note: Influence of rinsing and drying routines on growth of multilayer thin films using automated deposition system
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 81, Issue 3, Pages 036103
Publisher
AIP Publishing
Online
2010-03-05
DOI
10.1063/1.3310088

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