High throughput optical readout of dense arrays of nanomechanical systems for sensing applications

Title
High throughput optical readout of dense arrays of nanomechanical systems for sensing applications
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 81, Issue 12, Pages 125109
Publisher
AIP Publishing
Online
2010-12-29
DOI
10.1063/1.3525090

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