Cantilevered bimorph-based scanner for high speed atomic force microscopy with large scanning range

Published 2010 View Full Article

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Title
Cantilevered bimorph-based scanner for high speed atomic force microscopy with large scanning range
Authors
Keywords
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Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 81, Issue 5, Pages 053708
Publisher
AIP Publishing
Online
2010-05-29
DOI
10.1063/1.3428731
References
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