Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope

Published 2009 View Full Article

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Title
Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope
Authors
Keywords
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Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 80, Issue 7, Pages 073706
Publisher
AIP Publishing
Online
2009-07-28
DOI
10.1063/1.3184023

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