Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method

Title
Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 80, Issue 8, Pages 085101
Publisher
AIP Publishing
Online
2009-08-08
DOI
10.1063/1.3186735

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