High-resolution laser lithography system based on two-dimensional acousto-optic deflection

Published 2009 View Full Article

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Title
High-resolution laser lithography system based on two-dimensional acousto-optic deflection
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 80, Issue 8, Pages 085105
Publisher
AIP Publishing
Online
2009-08-20
DOI
10.1063/1.3202274
References
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