Two-dimensional micron-step probe drive for laboratory plasma measurement

Published 2008 View Full Article

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Title
Two-dimensional micron-step probe drive for laboratory plasma measurement
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 79, Issue 8, Pages 083505
Publisher
AIP Publishing
Online
2008-08-26
DOI
10.1063/1.2972150

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