A new microscope optics for laser dark-field illumination applied to high precision two dimensional measurement of specimen displacement

Published 2008 View Full Article

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Title
A new microscope optics for laser dark-field illumination applied to high precision two dimensional measurement of specimen displacement
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 79, Issue 2, Pages 023704
Publisher
AIP Publishing
Online
2008-02-16
DOI
10.1063/1.2839914

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