An ultrahigh vacuum complementary metal oxide silicon compatible nonlithographic system to fabricate nanoparticle-based devices

Published 2008 View Full Article

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Title
An ultrahigh vacuum complementary metal oxide silicon compatible nonlithographic system to fabricate nanoparticle-based devices
Authors
Keywords
-
Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 79, Issue 3, Pages 033910
Publisher
AIP Publishing
Online
2008-03-28
DOI
10.1063/1.2885042

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