Plasma- and vacuum-ultraviolet (VUV) photo-polymerisation of N- and O-rich thin films

Published 2009 View Full Article

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Title
Plasma- and vacuum-ultraviolet (VUV) photo-polymerisation of N- and O-rich thin films
Authors
Keywords
-
Journal
RADIATION PHYSICS AND CHEMISTRY
Volume 79, Issue 3, Pages 310-314
Publisher
Elsevier BV
Online
2009-08-27
DOI
10.1016/j.radphyschem.2009.08.009

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