Stabilization of wurtzite Sc0.4Al0.6N in pseudomorphic epitaxial ScxAl1−xN/InyAl1−yN superlattices

Title
Stabilization of wurtzite Sc0.4Al0.6N in pseudomorphic epitaxial ScxAl1−xN/InyAl1−yN superlattices
Authors
Keywords
Ab initio, calculations, Sputter deposition, Nitrides, Superlattice, Metastable phases
Journal
ACTA MATERIALIA
Volume 94, Issue -, Pages 101-110
Publisher
Elsevier BV
Online
2015-05-16
DOI
10.1016/j.actamat.2015.04.033

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