The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Published 2015 View Full Article

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Title
The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors
Authors
Keywords
-
Journal
Beilstein Journal of Nanotechnology
Volume 6, Issue -, Pages 1904-1926
Publisher
Beilstein Institut
Online
2015-09-16
DOI
10.3762/bjnano.6.194

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