Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices

Published 2013 View Full Article

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Title
Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices
Authors
Keywords
-
Journal
PROGRESS IN SURFACE SCIENCE
Volume 88, Issue 2, Pages 171-211
Publisher
Elsevier BV
Online
2013-04-27
DOI
10.1016/j.progsurf.2013.03.001

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